Laser Processing Systems

Tamarack laser processing systems have been proven technology since 1988 for a wide range of applications from semiconductor packaging to medical device manufacturing to MEMS.

Excimer Laser Processing Systems

Excimer laser systems can be used to ablate, anneal, de-bond and expose. Excimer ablation is best described as photo-chemically initiated electron excitation leading to a sudden increase in pressure which results in an explosive removal of material into monomers and gases known as ablation.

Tamarack Excimer Laser Systems utilize a mask to determine the pattern to be produced for ablation and exposure. This method of processing permits the generation of many complex shapes with minimal thermal effects, and produces superior edge quality while providing the flexibility to change shapes simply by changing the mask. Tamarack’s proprietary large beam projection technology provides uniform illumination of large areas and patterns for optimal throughput.

Tamarack’s Excimer Laser Processing Systems include:

• M420 Series of Exclaimer – for ablating & exposing
• M440 Series of Exclaimer Line Beam Systems – for annealing & debonding
• M500 Series of R2R Exclaimer Laser Systems – for ablating & exposing